Integration of SWNT film into MEMS for a micro-thermoelectric device
Integration of SWNT film into MEMS for a micro-thermoelectric device
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DOI：
10.1088/0964-1726/19/7/075003
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发表时间：
2010-05
影响因子：
4.1
通讯作者：
V. Dau;D. Dao;Takeo Yamada;B. T. Tung;K. Hata;S. Sugiyama
中科院分区：
文献类型：
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作者：
V. Dau;D. Dao;Takeo Yamada;B. T. Tung;K. Hata;S. Sugiyama
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This paper reports the top-down fabrication of carbon nanotube (CNT) thin film on microelectrical mechanical systems (MEMS) and the characterization of the thermoelectric coefficients of aligned single-walled carbon nanotube (SWNT) forest film. The film was synthesized by water-assisted chemical vapor deposition (CVD), a process known as ‘super-growth’. CNT film was then condensed, manually maneuvered, and conveniently patterned by electron beam (EB) lithography to form desirable shapes. We demonstrate this process by patterning an array of Au–CNT thermocouples; measurement under room temperature conditions reveals the Seebeck coefficient of aligned SWNT film to be 18–20 µV C − 1.