Geometry distortions of nanostructure edges scanned with amplitude-modulated atomic force microscopes
Geometry distortions of nanostructure edges scanned with amplitude-modulated atomic force microscopes
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DOI：
10.1088/0957-0233/24/11/115008
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发表时间：
2013-11
影响因子：
2.4
通讯作者：
D. Hüser;W. Häßler-Grohne;Jonathan J. Hüser
中科院分区：
文献类型：
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作者：
D. Hüser;W. Häßler-Grohne;Jonathan J. Hüser
在纳米技术和半导体制造中，纳米结构的几何参数（诸如曲率和侧壁角）随着特征尺寸的减小而具有越来越大的相关性。原子力显微镜（AFM）仍然是研究形貌参数的主要测量工具之一。它通常在振荡模式下操作，以避免探头的磨损或损坏。由于成像仪器传递的数据受探测过程的影响，因此需要适当的重建过程。本文显示了一个显着的对比的相位滞后的振幅调制原子力显微镜（AM-AFM）的探针和它的驱动力在具有高纵横比的纳米结构的边缘过渡。模拟模型揭示了相互作用力和所观察到的相行为之间的关系。它说明了如何振荡探针的平衡位置不同于那些纯粹是静态探针针尖接触扩张的样品几何形状。我们表明，AFM测量振荡模式提供了一个扭曲的地形图像，失真越大，涉及更多的能量耗散。对变形机制的理解是制定重建战略的基础。
In nanotechnology and semiconductor fabrication geometry parameters of nanostructures such as curvatures and side wall angles are of increasing relevance with decreasing feature sizes. The atomic force microscope (AFM) is still one of the main measurement tools employed to investigate topographical parameters. It is generally operated in oscillation mode in order to avoid wear or damage of the probe. As imaging instruments deliver data that are influenced by the probing process, appropriate reconstruction processes are needed. This paper shows a significant contrast of the phase lag of the probe of an amplitude-modulated AFM (AM-AFM) and its driving force at the edge transition of nanostructures with a high aspect ratio. A simulation model reveals the relation between interaction forces and the observed phase behavior. It illustrates how the equilibrium positions of an oscillating probe differ from those of a sample geometry that is purely dilated by static probe tip contact. We show that AFM measurements in oscillation mode deliver a distorted topography image and that the greater the distortion the more energy dissipation is involved. An understanding of the distortion mechanism forms the basis for the development of reconstruction strategies.