The design and fabrication of a low-field NMR probe based on a multilayer planar microcoil

The design and fabrication of a low-field NMR probe based on a multilayer planar microcoil
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基于多层平面微线圈的低场核磁共振探头的设计与制作

DOI:
10.1007/s00542-013-1908-7
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发表时间:
2013
期刊:
Microsystem Technologies
影响因子:
--
通讯作者:
Z. Ni
Z. Ni
中科院分区:
--
文献类型:
--
作者:
Wei;Hong Yi;Di Chen;Rongsheng Lu;Tao Yuan;Jingdong Chen;Z. Ni

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在核磁共振技术应用中,核磁共振探头对信号的发送和接收有很大的影响。本文介绍了一种由多层平面微线圈和聚二甲基硅氧烷(PDMS)微通道组成的核磁共振探头的设计、制造和测试。首先,通过理论分析确定了测头的几何参数。其次,基于玻璃基板,采用重复光刻和电镀工艺制造多层平面微线圈。在制作过程中,使用聚酰亚胺层来封装线圈,并使用PDMS中间层来调整线圈与样品室之间的中心线距离。在拉莫尔频率为28.1MHZ时,线圈的电阻为1.2158Ω,品质因数为7.217。最后,在核磁共振实验中对该核磁共振探针进行了测试。固体PDMS的横向弛豫时间T2为20.6±0.4ms,与Bruker MiniSpec MQ60测得的21.1±0.2ms一致。结果表明,这种核磁共振探针的设计和制作是可行的,适用于时域核磁共振的应用。
The nuclear magnetic resonance (NMR) probe has great influence on signal transmission and reception in NMR technology applications. In this paper, we present a design, fabrication, and test of an NMR probe comprised of a multilayer planar microcoil with a polydimethylsiloxane (PDMS) microchannel. First, geometric parameters of the probe are determined through theoretical analysis. Second, based on a glass substrate, the multilayer planar microcoil is manufactured using repeated photolithography and electroplating processes. During the fabrication process, the polyimide layer is used to package the coil, and the PDMS interlayer is used to adjust the distance from centerlines between the coil and the sample chamber. Third, the resistance and the quality factor of the coil are found to be 1.2158 Ω and 7.217, respectively, at a Larmor frequency of 28.1 MHz. Finally, the NMR probe is tested in an NMR experiment. The transverse relaxation time T2 for the solid PDMS is 20.6 ± 0.4 ms, which is in agreement with 21.1 ± 0.2 ms obtained by a Bruker Minispec MQ60. Results show that the design and fabrication of this NMR probe are feasible for time-domain NMR applications.
DOI: 10.1006/jmrb.1995.1112
发表时间: 1995-08-01
期刊: JOURNAL OF MAGNETIC RESONANCE SERIES B
影响因子: --
作者:
PECK, TL;MAGIN, RL;LAUTERBUR, PC
通讯作者: LAUTERBUR, PC