Inductive coupled radio frequency plasma bridge neutralizer.
Inductive coupled radio frequency plasma bridge neutralizer.
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电感耦合射频等离子体桥中和器。
DOI：
10.1063/1.2802587
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发表时间：
2008
影响因子：
1.6
通讯作者：
H. Neumann
中科院分区：
文献类型：
--
作者：
F. Scholze;M. Tartz;H. Neumann
提出了一种用于离子推进器应用以及绝缘材料的离子束表面处理的 13.56 MHz 射频等离子体桥中和器 (rf-PBN)。等离子体激发的能量通过感应耦合进入等离子体室。由于等离子体内部没有任何组件，因此 rf-PBN 的使用寿命预计会很长。紧凑的调谐系统使输入功率适应等离子体阻抗。电子电流可以通过射频输入功率在很宽的范围内控制。已提取高达 1.6 A 的电子电流。
A 13.56 MHz radio frequency plasma bridge neutralizer (rf-PBN) for ion thruster applications as well as ion beam surface processing of insulating materials is presented. The energy for the plasma excitation is inductively coupled into the plasma chamber. Because no components are located inside the plasma, the lifetime of the rf-PBN is expected to be very long. A compact tuning system adapts the input power to the plasma impedance. The electron current may be controlled over a wide range by the rf input power. An electron current of up to 1.6 A has been extracted.