Hybrid Characterization of Nanolitre Dielectric Fluids in a Single Microfluidic Channel Up to 110 GHz
Hybrid Characterization of Nanolitre Dielectric Fluids in a Single Microfluidic Channel Up to 110 GHz
复制标题
高达 110 GHz 的单个微流体通道中纳升电介质流体的混合表征
DOI：
10.1109/tmtt.2017.2731950
复制
发表时间：
2017
影响因子：
4.3
通讯作者：
B. Nauwelaers
中科院分区：
文献类型：
--
作者：
Song Liu;N. Orloff;Charles A. E. Little;Wei Zhao;J. Booth;Dylan F. Williams;I. Ocket;D. Schreurs;B. Nauwelaers
在本文中，我们提出了一种新的“混合”的方法在晶圆介电测量的纳升流体样品。混合方法的第一部分使用提取用于制造微流体通道的材料的复相对介电常数的技术。提取是利用空信道测量来执行的，因此不需要额外的去嵌入结构。混合方法的第二部分涉及介电流体的复相对介电常数的精确提取。该混合方法使用三种不同的提取算法，并在NIST微波不确定性框架内计算其B类不确定性。通过选择在每个频率下具有最小不确定性的计算算法，混合方法可以在宽带宽上实现流体介电常数的精确测量。这三种算法之一是一种新的算法基于封闭形式的方程。一个跟踪为基础的算法也适用于流体测量，第一次我们的知识。通过不确定性分析，我们发现，这两种算法应优于传统的基于最小二乘优化的算法在毫米波频率，由于其较低的灵敏度探针放置误差。
In this paper, we present a new “hybrid” method for on-wafer dielectric measurements of nanolitre fluid samples. The first part of the hybrid method uses a technique that extracts the complex relative permittivity of the material used to make microfluidic channels. The extraction is performed with an empty channel measurement, and thus requires no extra deembedding structures. The second part of the hybrid method involves an accurate extraction of the complex relative permittivity of dielectric fluids. The hybrid method uses three different extraction algorithms and calculates their Type B uncertainties within the NIST Microwave Uncertainty Framework. By choosing the calculation algorithm with the smallest uncertainty at each frequency, the hybrid method can achieve accurate measurements of the fluids’ permittivity over a broad bandwidth. One of the three algorithms is a new algorithm based on closed-form equations. A trace-based algorithm is also applied to fluids measurements, for the first time to our knowledge. Through the uncertainty analysis, we found out that these two algorithms should be favored over a traditional least-squares optimization-based algorithm at millimeter wave frequencies, due to their lower sensitivities to probe-placement errors.