Extended model for the reconstruction of periodic multilayers from extreme ultraviolet and X-ray reflectivity data
Extended model for the reconstruction of periodic multilayers from extreme ultraviolet and X-ray reflectivity data
复制标题
根据极紫外和 X 射线反射率数据重建周期性多层的扩展模型
DOI：
10.1107/s1600576717012286
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发表时间：
2017
影响因子：
6.1
通讯作者：
Dmitry Gaman
中科院分区：
文献类型：
--
作者：
M. Svechnikov;D. E. Pariev;A. N. Nechay;N. Salashchenko;N. Chkhalo;Y. Vainer;Dmitry Gaman
提出了一个扩展的模型，用于从X射线和极紫外范围内的反射数据重建多层纳米结构。与标准模型方法（预先将过渡区域定义为特定函数）相反，在扩展模型中，过渡层被视为多个函数的线性组合。这使得人们可以描述一个更广泛的类别的多层结构与不同的主要物理机制的过渡区的形成。扩展模型占据了经典模型方法和所谓的无模型方法之间的中间位置。所描述的方法的效率详细说明在数值模拟和真实的实验退火的多层Mo/Be镜。
An extended model for the reconstruction of multilayer nanostructures from reflectometry data in the X-ray and extreme ultraviolet ranges is proposed. In contrast to the standard model approach, where the transitional region is defined in advance as a specific function, the transition layer is sought as a linear combination of several functions at once in the extended model. This allows one to describe a much wider class of multilayer structures with different dominant physical mechanisms for the formation of transition regions. The extended model occupies an intermediate position between the classical model approach and the so-called model-free methods. The efficiency of the described method is illustrated in detail in numerical simulations and in a real experiment on the annealing of a multilayer Mo/Be mirror.
Be/Al 基多层反射镜，具有改进的反射和光谱选择性，适用于 17 nm 波长以上的太阳天文学
影响因子：
2.1
作者：
N.I. Chkhalo;D.E. Pariev;V.N. Polkovnikov;N.N. Salashchenko;R.A. Shaposhnikov;I.L. Stroulea;M.V. Svechnikov;Yu.A. Vainer;S.Yu. Zuev
通讯作者：
S.Yu. Zuev