Periodic Large-Area Metallic Split-Ring Resonator Metamaterial Fabrication Based on Shadow Nanosphere Lithography
Periodic Large-Area Metallic Split-Ring Resonator Metamaterial Fabrication Based on Shadow Nanosphere Lithography
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DOI：
10.1002/smll.200800923
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发表时间：
2009-02-06
期刊：
影响因子：
13.3
通讯作者：
Giessen, Harold
中科院分区：
文献类型：
--
作者：
Gwinner, Michael Christian;Koroknay, Elisabeth;Giessen, Harold
提出了一种快速、廉价、大面积（>1 cm（2））、高覆盖率的周期性金属开口环谐振器超材料制备技术，该技术允许控制内环和外环直径、间隙角以及厚度和周期性。该方法基于阴影纳米球光刻，使用倾斜角旋转热蒸发到紧密堆积的聚苯乙烯纳米球的朗缪尔-布洛杰特型单层上。的过程参数与简化模型的良好协议被证明。在100 THz范围内的明显的可调谐光学超材料共振与模拟一致。
A fast and cheap, large-area (>1 cm(2)), high-coverage fabrication technique for periodic metallic split-ring resonator metamaterials is presented, which allows control of inner- and outer-ring diameters, gap angles, as well as thickness and periodicity. This method, based on shadow nanosphere lithography, uses tilted-angle-rotation thermal evaporation onto Langmuir-Blodgett-type monolayers of close-packed polystyrene nanospheres. Excellent agreement of the process parameters with a simplified model is demonstrated. Pronounced, tunable optical metamaterial resonances in the range of 100 THz are consistent with simulations.