Preparation of positive photoreactive polyimides and their characterization
Preparation of positive photoreactive polyimides and their characterization
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正性光反应聚酰亚胺的制备及其表征
DOI：
10.1002/app.1987.070330528
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发表时间：
1987
影响因子：
3
通讯作者：
A. Fukami
中科院分区：
文献类型：
--
作者：
S. Kubota;T. Moriwaki;T. Ando;A. Fukami
聚酰亚胺前体由二胺和二酸氯化物合成，二酸氯化物由丙偏苯四酸二酐和邻硝基苯甲醇的反应物衍生。用动态热重法研究了它们在氮气中的热性质，并用紫外和红外分光光度法研究了它们的光反应机理。将聚酰亚胺前体旋涂到硅晶片上，预烘烤，然后暴露于来自高压汞灯的UV光。当在照射后将膜浸入2%KOH水溶液中时，曝光区域溶解，形成高分辨率图案。测定了聚合物的相对灵敏度。
Polyimide precursors were synthesized from a diamine and a diacid chloride that was derived from the reactant with promellitic dianhydride and o-nitrobenzyl alcohol. Their thermal properties were studied in nitrogen using dynamic thermogravimetry, and the photoreaction mechanism was investigated by ultraviolet and infrared spectrophotometry. The polyimide precursors were spin-coated onto silicon wafers, prebaked, and then exposed to UV light from a high pressure Hg–Xe lamp. When the films were dipped into 2% aqueous KOH after irradiation, the exposed area dissolved forming high resolution patterns. Relative sensitivities of the polymers were determined.