Noncontact scanning force microscopy based on a modified tuning fork sensor

Noncontact scanning force microscopy based on a modified tuning fork sensor
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DOI:
10.1063/1.1304881
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发表时间:
2000-08-01
影响因子:
1.6
通讯作者:
Heckl, WM
Heckl, WM
中科院分区:
工程技术4区
文献类型:
--
作者:
Göttlich, H;Stark, RW;Heckl, WM

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距离控制使用音叉设置检测剪切力是扫描近场光学显微镜(SNOM)的标准配置。基于这一概念,一个修改后的传感器,其中原子力显微镜(AFM)的标准硅尖连接到一个100 kHz的石英音叉振荡器的一个叉的前端。标准的双模态AFM悬臂梁,传统的光纤针尖SNOM传感器和新的AFM针尖剪切力传感器的力曲线的比较表明,增强的稳定性和灵敏度的新传感器。由于刚性传感器的设计,AFM针尖剪切力传感器的力曲线表明在空气中的正常条件下的完美的非接触行为。非接触式图像显示出与传统力显微镜相当的分辨率。(C)2000年美国物理学会。[S0034- 6748(00)02708-8]。
Distance control using a tuning fork setup for the detection of shear forces is a standard configuration in scanning near-field optical microscopy (SNOM). Based on this concept, a modified sensor was developed, where a standard silicon tip for atomic force microscopy (AFM) is attached to the front end of one prong of a 100 kHz quartz tuning fork oscillator. Comparison of force curves of a standard tapping-mode AFM cantilever, a conventional fiber tip SNOM sensor and the novel AFM tip shear force sensor demonstrate an enhanced stability and sensitivity of the new sensor. Due to the rigid sensor design the force curves of the AFM tip shear force sensor indicate a perfect noncontact behavior under normal conditions in air. Noncontact images show a comparable resolution to conventional force microscopy. (C) 2000 American Institute of Physics. [S0034- 6748(00)02708-8].