Passivation of Silicon Surfaces by Heat Treatment in Boiled Water and its Application of
Passivation of Silicon Surfaces by Heat Treatment in Boiled Water and its Application of
复制标题
硅表面沸水热处理钝化及其应用
DOI：
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发表时间：
2014
期刊：
影响因子：
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通讯作者：
and Toshiyuki Sameshima
中科院分区：
文献类型：
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作者：
Tomohiko Nakamura;Shinya Yoshidomi;Masahiko Hasumi;and Toshiyuki Sameshima
