Self-organized nanoscale multilayer growth in hyperthermal ion deposition
Self-organized nanoscale multilayer growth in hyperthermal ion deposition
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DOI：
10.1103/physrevb.70.245418
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发表时间：
2004-12
影响因子：
3.7
通讯作者：
I. Gerhards;H. Stillrich;C. Ronning;H. Hofsäss;M. Seibt
中科院分区：
文献类型：
--
作者：
I. Gerhards;H. Stillrich;C. Ronning;H. Hofsäss;M. Seibt
在低能质量选择碳和金属(Au或Fe)离子共沉积薄膜的过程中，发现了自组织效应。虽然碳和金属离子是准同时沉积的，但仍生长出富金属和缺金属交替的多层膜结构。这些层的周期为几个纳米$(\ensuremath{\sim}6\text{\ensuremath{-}}20\phantom{\rule{0.3em}{0ex}}\mathrm{nm})$，量级，富金属层由金属纳米晶体组成。从不同金属小团簇的结构性质、溅射产额的影响、沉积参数等方面，与以往对{C-}、{C--、{Ag}薄膜的研究进行了比较，讨论了多层膜的形成过程。对于各种化合物薄膜材料，我们期望在同时溅射沉积或离子束沉积元件的过程中形成多层结构。这种情况的假设是：(A)沉积的元素是不相容的或存在不相容的化合物相，(B)撞击物种施加的薄膜成分的溅射产额在适当的范围内，以及(C)一种化合物在表面分离。
In the course of thin film growth by co-deposition of low energy mass selected carbon and metal (Au or Fe) ions, an effect of self-organization was found. Although carbon and metal ions were deposited quasi-simultaneously, a multilayer film structure of alternately metal-rich and metal-deficient layers was grown. The period of these layers is of the order of a few nanometers $(\ensuremath{\sim}6\text{\ensuremath{-}}20\phantom{\rule{0.3em}{0ex}}\mathrm{nm})$, and the metal-rich layers consist of metallic nanocrystals. The multilayer formation process is discussed in comparison with earlier studies on $\mathrm{C}\ensuremath{-}\mathrm{Cu}$ and $\mathrm{C}\ensuremath{-}\mathrm{Ag}$ films with respect to the structural properties of small clusters of the different metals, the influence of sputtering yields, and the deposition parameters. For a variety of compound thin film materials we expect a multilayer structure to develop during simultaneous sputter deposition or ion beam deposition of the components. The suppositions for this scenario are: (a) the deposited elements are immiscible or there are immiscible phases of a compound material, (b) the sputtering yields of the film components imposed by the impinging species are in an appropriate range, and (c) one compound segregates at the surface.