Micromachining bulk glass by use of femtosecond laser pulses with nanojoule energy

Micromachining bulk glass by use of femtosecond laser pulses with nanojoule energy
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DOI:
10.1364/ol.26.000093
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发表时间:
2001-01-15
期刊:
影响因子:
3.6
通讯作者:
Mazur, E
Mazur, E
中科院分区:
物理与天体物理2区
文献类型:
--
作者:
Schaffer, CB;Brodeur, A;Mazur, E

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使用紧紧聚焦的飞秒激光脉冲只有5 nJ,我们产生光学击穿和结构变化的散装透明材料,并展示了透明材料的微加工通过使用未放大的激光。我们目前的测量康宁0211玻璃中的结构变化的阈值,以及由单个和多个激光脉冲产生的结构的形态的研究。在高重复率下,多个脉冲产生由连续激光脉冲对材料的累积加热主导的结构变化。利用这种累积的热效应,我们只使用激光振荡器就可以在大块玻璃中写入单模光波导。(C)2001年美国光学学会。
Using tightly focused femtosecond laser pulses of just 5 nJ, we produce optical breakdown and structural change in bulk transparent materials and demonstrate micromachining of transparent materials by use of unamplified lasers. We present measurements of the threshold for structural change in Corning 0211 glass as well as a study of the morphology of the structures produced by single and multiple laser pulses. At a high repetition rate, multiple pulses produce a structural change dominated by cumulative heating of the material by successive laser pulses. Using this cumulative heating effect, we write single-mode optical waveguides inside bulk glass, using only a laser oscillator. (C) 2001 Optical Society of America.