A miniaturized levitation system with motion control using a piezoelectric actuator

A miniaturized levitation system with motion control using a piezoelectric actuator
复制标题

使用压电执行器进行运动控制的小型悬浮系统

DOI:
10.1109/tcst.2002.801802
复制
发表时间:
2002
期刊:
IEEE Trans. Control. Syst. Technol.
影响因子:
--
通讯作者:
T. Higuchi
T. Higuchi
中科院分区:
--
文献类型:
--
作者:
T. Morita;K. Shimizu;Masayuki Hasegawa;K. Oka;T. Higuchi

文献摘要

被引文献

相似文献

提出了一种利用永磁体与直线驱动器相连接的微悬浮系统,用于微操作。调节小铁球与永磁体之间的气隙长度,以平衡磁力和重力。压电致动器是用来控制气隙长度,因为它的简单的结构和低潜在的热问题。一个直径为2.0 mm的小铁球成功地从起始位置悬浮了约40 /spl mu/m。时间常数在20毫秒的范围内。这一成功应有助于未来的努力,利用静电或分子间力的非接触悬浮液。
A microlevitation system utilizing a permanent magnet attached to a linear actuator is proposed for the purpose of micromanipulation. The air gap length between a small iron ball and a permanent magnet is adjusted to balance the magnetic force and gravity force. A piezoelectric actuator is used to control the air gap length because of its simple construction and low potential for thermal problems. A small iron ball 2.0 mm in diameter was successfully levitated about 40 /spl mu/m from the starting position. The time constant was within the range of 20 ms. This success should contribute to future efforts that utilize electrostatic or intermolecular forces for the noncontact suspension.