Microwave plasma system for material processing
Microwave plasma system for material processing
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用于材料加工的微波等离子体系统
DOI：
10.1109/tps.2005.845005
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发表时间：
2005
影响因子：
1.5
通讯作者：
J. Lucas
中科院分区：
文献类型：
--
作者：
S. Wylie;A. Al;J. Lucas
微波等离子体系统在包括0.896、2.45和10 GHz的各种频率范围下操作，并使用基于波导的施加器在大气压下产生微波等离子体射流（MPJ）。等离子体由于由微波功率产生的强电场而在腔体外部形成，所述强电场发生在气体喷嘴和施加器中的孔之间。MPJ系统使用各种气体和气体混合物产生等离子体，包括氩气、氦气、氧气和氮气。MPJ已成功用于各种材料加工，包括焊接、切割和从高熔点材料（如陶瓷）生产纤维。
The microwave plasma system operates at various ranges of frequencies including 0.896, 2.45, and 10 GHz, and uses a waveguide-based applicator to generate a microwave plasma jet (MPJ) at atmospheric pressure. The plasma is formed outside the cavity due to the strong electric field, generated by the microwave power, which occurs between the gas nozzle and an aperture in the applicator. The MPJ system has produced plasmas using a variety of gases and gas mixtures, including argon, helium, oxygen, and nitrogen. The MPJ has been used successfully for various materials processing including welding, cutting, and production of fibers from high-melting temperature materials, such as ceramic.