Ar-dilution effects on the elastic and structural properties of hydrogenated hard carbon films deposited by plasma-enhanced chemical vapor deposition
Ar-dilution effects on the elastic and structural properties of hydrogenated hard carbon films deposited by plasma-enhanced chemical vapor deposition
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DOI：
10.1016/s0925-9635(00)00391-5
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发表时间：
2001-03
影响因子：
4.1
通讯作者：
L. Valentini;J. Kenny;G. Mariotto;P. Tosi;G. Carlotti;D. Fioretto;L. Lozzi;S. Santucci
中科院分区：
文献类型：
--
作者：
L. Valentini;J. Kenny;G. Mariotto;P. Tosi;G. Carlotti;D. Fioretto;L. Lozzi;S. Santucci
