AFM, XRD and HRTEM Studies οf Annealed FePd Thin Films
AFM, XRD and HRTEM Studies οf Annealed FePd Thin Films
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退火 FePd 薄膜的 AFM、XRD 和 HRTEM 研究
DOI：
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发表时间：
2010
期刊：
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通讯作者：
M. Marszałek
中科院分区：
文献类型：
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作者：
M. Perzanowski;Y. Zabila;J. Morgiel;A. Polit;M. Krupiński;A. Dobrowolska;M. Marszałek
铁磁FePd L10有序合金被高度期望作为即将到来的高密度记录材料，因为它们显示出大的垂直磁晶各向异性[1]。FePd合金的磁各向异性值与合金成分、合金有序度以及晶粒取向密切相关。特别地，为了获得垂直各向异性，需要获得具有（001）织构的薄膜。其中一个成功的方法，它允许一个获得高度有序的合金，是随后的Fe和Pd层的沉积，然后在高温下退火。本文研究了FePd合金薄膜在高温退火过程中的结构变化。在高真空退火过程中，进行了电阻测量，指出了不同结构演变的区域。通过X射线衍射、原子力显微镜和高分辨透射电子显微镜研究了热处理引起的晶体结构和表面形貌的变化，并与电阻率测量进行了比较。沉积层的缓慢热退火导致形成具有（111）择优取向的L10有序FePd合金。在最高使用温度下退火后，观察到去湿过程，导致产生良好取向的规则纳米颗粒。
Ferromagnetic FePd L10 ordered alloys are highly expected as forthcoming high-density recording materials, because they reveal a large perpendicular magnetocrystalline anisotropy [1]. The value of the magnetic anisotropy of FePd alloy strongly depends on the alloy composition, degree of alloy order as well as on the crystallographic grain orientation. In particular, to obtain the perpendicular anisotropy, it is necessary to get the films with (001) texture. One of the successful methods, which allows one to obtain highly ordered alloy, is a subsequent deposition of Fe and Pd layers, followed by an annealing at high temperature. This paper presents the study of the FePd thin alloy film structure changing in the result of high temperature annealing. During the annealing in high vacuum, the measurements of electrical resistance were performed, indicating the regions of different structure evolution. Changes in the crystal structure and surface morphology induced by thermal treatment were investigated by X-ray diffraction, atomic force microscopy, as well as high resolution transmission electron microscopy and then compared with electrical resistivity measurement. The slow thermal annealing of the deposited layers leads to the formation of L10 ordered FePd alloy with preferred (111) grain orientation. After the annealing at the highest used temperature, the dewetting process was observed, resulting in a creation of well oriented, regular nanoparticles.