Micro Electrochemical Discharge Machining of Glass
Micro Electrochemical Discharge Machining of Glass
复制标题
玻璃微电化学放电加工
DOI：
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发表时间：
1998
期刊：
影响因子：
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通讯作者：
T. Masuzawa
中科院分区：
文献类型：
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作者：
H. Langen;J. Breguet;H. Bleuler;Renaud Ph.;T. Masuzawa
玻璃基板的微加工与标准针和其他自制的微工具。该加工可以被描述为电化学放电加工（ECDM），其中针或微型工具（阴极）和阳极被浸入电解质（NaOH）中并连接到具有限流电阻器的全整流波发生器的输出。对于微加工过程中，玻璃和工具加工集成在同一台机器上。采用电火花线切割磨削技术加工出任意形状的微细工具。此外，实验装置是使用一个微型机器人与粘滑驱动器。该机器人定位在平坦表面（XY<I>）上，并且具有用于阴极垂直位移的附加压电粘滑单元（Z）。在不旋转刀具的情况下，对盖板玻璃进行了自动和手动两种模式的凹模和铣削实验。典型的研磨速度为0.5mm/s。此外，几个微工具与WEDG生产附加到这个微型机器人的玻璃加工。
Glass substrates were micromachined with standard needles and other self-made microtools. The machining can be described as electrochemical discharge machining (ECDM), where the needle or microtool (cathode) and an anode are dipped in electrolyte (NaOH) and connected to the output of a full rectifying wave generator with a current -limiting resistor. For micro machining a procedure is presented where glass and tool machining are integrated on the same machine. Microtools of arbitrary shapes were produced using Wire Electro-Discharge Grinding (WEDG). Furthermore, an experimental setup was made using a mini-robot with stick-slip actuators. This robot is positioned on a flat surface (XY<I» and has an additional piezo stick-slip unit (Z) for vertical displacement of cathode. Die-sinking and milling experiments, without rotation of tool, were done on cover glass in automatic and manual mode. Typical milling speeds were 0.5mmJs. Furthermore, several microtools produced with WEDG were attached to this mini-robot for glass machining.