Design of an inchworm-type linear piezomotor
Design of an inchworm-type linear piezomotor
复制标题
尺蠖式线性压电电机的设计
DOI：
10.1117/12.175214
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发表时间：
1994
期刊：
影响因子：
--
通讯作者：
Zhenqi Zhu
中科院分区：
文献类型：
--
作者：
Bi Zhang;Zhenqi Zhu
本文详细介绍了一种由三个压电作动器、一个整体柔性框架和一个导轨组成的尺蠖型线性压电驱动器的设计和研制。采用有限元法优化弹性铰链的刚度，计算柔性框架的应力应变场，完成了柔性框架的设计。讨论了螺栓接头的屈曲、导轨的界面刚度以及线性压电电机运动的急动。线性压电陶瓷能够在300 mm的行程范围内以1.6 mm/s的速度移动，定位分辨率为5 nm。它还提供90 N/微米的刚度和200 N的输出力。
This paper details the design and development of an inchworm-type linear piezomotor that consists of three piezoelectric actuators, a monolithic flexure frame, and a guideway. The design is accomplished using the finite element methods to optimize the stiffness of elastic hinges and to calculate the stress-strain field of the flexure frame. The buckling of the bolted joints and interface stiffness of the quideway, and jerking of the linear piezomotor motion, are discussed. The linear piezomotor is capable of traveling speed of 1.6 mm/s over a travel range of 300 mm with a positioning resolution of 5 nm. It also provides a stiffness of 90 N/micrometers and an output force of 200 N.