Surface Microstructure of Mo(C)N Coatings Investigated by AFM
Surface Microstructure of Mo(C)N Coatings Investigated by AFM
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DOI：
10.1007/s11665-016-2390-z
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发表时间：
2016-12-01
影响因子：
2.3
通讯作者：
Warcholinski, B.
中科院分区：
文献类型：
--
作者：
Kuznetsova, T.;Zubar, T.;Warcholinski, B.
MoCN涂层是使用乙炔和氮气的混合物以及纯钼靶材通过阴极电弧蒸发形成的。通过原子力显微镜 (AFM) 结合 X 射线数据分析表面结构。 AFM 结果显示所研究的涂层表面具有不同形状的晶粒形式。化学涂层成分中碳的增加导致表面晶粒尺寸减小和涂层粗糙度增加。
MoCN coatings have been formed by cathodic arc evaporation using the mixture of acetylene and nitrogen and pure molybdenum target. The surface structure, in conjunction with x-ray data, was analyzed by atomic force microscopy (AFM). The AFM results show differently shaped grain forms on the surface of coatings investigated. The increase in carbon in chemical coatings composition results in the reduction in surface grain size and the increase in roughness of the coatings.