Precision grinding of optical glass with laser micro-structured coarse-grained diamond wheels
Precision grinding of optical glass with laser micro-structured coarse-grained diamond wheels
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DOI：
10.1016/j.jmatprotec.2013.12.013
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发表时间：
2014-05
影响因子：
6.3
通讯作者：
B. Guo;Qingliang Zhao;Xiaoyang Fang
中科院分区：
文献类型：
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作者：
B. Guo;Qingliang Zhao;Xiaoyang Fang
为提高光学玻璃表面磨削性能，特别是亚表面损伤性能，提出了一系列用于光学玻璃表面磨削的微结构粗粒金刚石砂轮。利用纳秒脉冲激光成功制备了150 μm粒度、不同间距微槽阵列的单层电镀金刚石砂轮。研究了微结构对表面粗糙度和亚表面损伤的影响。与常规粗晶金刚石砂轮相比，微结构粗晶金刚石砂轮的亚表面损伤深度从5 μm有效降低到1.5 μm，但表面粗糙度没有提高。表面粗糙度和亚表面损伤深度随微槽阵列间距的减小而减小。
This paper presents a series of micro-structured coarse-grained diamond wheels for optical glass surface grinding aiming to improve the grinding performance, especially subsurface damage. The 150 μm grit size, single layer electroplated diamond grinding wheels with different interval micro-groove arrays were manufactured by nanosecond pulsed laser, successfully. The influence of micro-structures on surface roughness and subsurface damage was investigated. Compared with conventional coarse-grained diamond wheel, the subsurface damage depth was reduced effectually from 5 to 1.5 μm, although the better surface roughness was not obtained by the micro-structured coarse-grained diamond wheel. In addition, the surface roughness and subsurface damage depth were both reduced with the decreasing interval of micro-groove arrays.