Scanning Hall Probe Microscopy with Shear Force Distance Control
Scanning Hall Probe Microscopy with Shear Force Distance Control
复制标题
具有剪切力距离控制的扫描霍尔探针显微镜
DOI：
10.1063/1.372749
复制
发表时间：
2000
影响因子：
3.2
通讯作者：
K. Eberl
中科院分区：
文献类型：
--
作者：
T. Schweinböck;D. Weiss;M. Lipinski;K. Eberl
本文描述了一种在室温下工作的新型扫描霍尔探针显微镜，用于磁场杂散的定量和无创测量。探针与样品的距离是通过压电检测作用在振荡悬臂上的剪切力来控制的。霍尔探针是由预图像化的GaAs晶片制成的，晶片上生长着GaAs/AlGaAs异质结构，在表面以下几十纳米处含有高迁移率的二维电子气体。有源霍尔面积由光学和电子束光刻确定，结宽为0.6 μm，分辨率约为0.4 μm。该传感器在室温下的霍尔系数为0.23 Ω/G，噪声级为~ 0.1 G/Hz1/2。我们展示了写在磁性硬盘上的位的杂散场模式的测量。
We describe a new type of scanning Hall probe microscope operating at room temperature for quantitative and noninvasive measurements of magnetic stray fields. The probe-sample distance is controlled by piezoelectrical detection of the shear forces acting on an oscillating cantilever. The Hall probes are manufactured from prepatterned GaAs wafers overgrown with a GaAs/AlGaAs heterostructure containing a high-mobility two-dimensional electron gas a few ten nm below the surface. The active Hall area is defined by optical and electron-beam lithography with a junction width of 0.6 μm yielding in a resolution of approximately 0.4 μm. The Hall coefficient of the sensor at room temperature is 0.23 Ω/G with a noise level of ∼0.1 G/Hz1/2. We show measurements of the stray field pattern of bits written on a magnetic hard disk.