Performance evaluation of numerical finite element coupled algorithms for structure-electric interaction analysis of MEMS piezoelectric actuator
Performance evaluation of numerical finite element coupled algorithms for structure-electric interaction analysis of MEMS piezoelectric actuator
复制标题
MEMS压电执行器结构电相互作用分析数值有限元耦合算法的性能评估
DOI：
10.1142/s0219876218501062
复制
发表时间：
2018
影响因子：
1.7
通讯作者：
Tomoyoshi Horie
中科院分区：
文献类型：
--
作者：
Prakasha Chigahalli Ramegowda;Daisuke Ishihara;Tomoyo Niho;Tomoyoshi Horie
本文介绍了用有限元法（FEM）实现的压电致动器的多物理场数值分析及其性能，以分析三维压电连续体中的结构-电相互作用。在这里，我们选择的压电双晶片驱动器没有金属垫片和与金属垫片作为低频问题和表面声波器件作为高频问题。由于微型飞行器的机翼是由压电双晶片驱动器在低频下驱动的，因此低频问题受到了更多的关注。采用Newmark时间积分法和中心差分时间积分法研究了压电驱动器的动态响应。给出了整体耦合、非迭代分区耦合和分区迭代耦合方案。在分区迭代耦合格式中，采用了块Jacobi和块Gauss-Seidel方法。谐振特性在微机电系统（MEMS）应用中非常重要。因此，使用我们提出的耦合算法，双压电晶片驱动器的谐振特性进行了分析。针对压电驱动器的三维结构-电耦合问题，对所提出的数值有限元耦合算法的精度和计算效率进行了比较。数值计算结果与理论解吻合较好。
This work presents multiphysics numerical analysis of piezoelectric actuators realized using the finite element method (FEM) and their performances to analyze the structure-electric interaction in three-dimensional (3D) piezoelectric continua. Here, we choose the piezoelectric bimorph actuator without the metal shim and with the metal shim as low-frequency problems and a surface acoustic wave device as a high-frequency problem. More attention is given to low-frequency problems because in our application micro air vehicle’s wings are actuated by piezoelectric bimorph actuators at low frequency. We employed the Newmark’s time integration and the central difference time integration to study the dynamic response of piezoelectric actuators. Monolithic coupling, noniterative partitioned coupling and partitioned iterative coupling schemes are presented. In partitioned iterative coupling schemes, the block Jacobi and the block Gauss–Seidel methods are employed. Resonance characteristics are very important in micro-electro-mechanical system (MEMS) applications. Therefore, using our proposed coupled algorithms, the resonance characteristics of bimorph actuator is analyzed. Comparison of the accuracy and computational efficiency of the proposed numerical finite element coupled algorithms have been carried out for 3D structure–electric interaction problems of a piezoelectric actuator. The numerical results obtained by the proposed algorithms are in good agreement with the theoretical solutions.