Nanofabrication of High-Resolution Periodic Structures with a Gap Size Below 100 nm by Two-Photon Polymerization
Nanofabrication of High-Resolution Periodic Structures with a Gap Size Below 100 nm by Two-Photon Polymerization
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DOI：
10.1186/s11671-019-2955-5
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发表时间：
2019-04-17
影响因子：
--
通讯作者：
Chichkov, Boris
中科院分区：
文献类型：
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作者：
Zheng, Lei;Kurselis, Kestutis;Chichkov, Boris
本文介绍了利用双光子聚合技术（2PP）制备亚100 nm尺度的高分辨率周期结构的方法。研究了激光强度对特征尺寸和表面质量的影响。比较了不同光敏材料对结构形成的影响。基于体素的椭圆几何特性，提出了通过控制激光聚焦相对于玻璃基板的位置，实现特征尺寸小于100 nm的高分辨率结构的思路。本研究涵盖了分别在体素长轴沿着和垂直于体素长轴的平面内制作的结构。作者还提供了一种有用的方法来管理所提出的周期性结构的制造，周期性距离为200 nm，间隙尺寸为65 nm。
In this paper, approaches for the realization of high-resolution periodic structures with gap sizes at sub-100 nm scale by two-photon polymerization (2PP) are presented. The impact of laser intensity on the feature sizes and surface quality is investigated. The influence of different photosensitive materials on the structure formation is compared. Based on the elliptical geometry character of the voxel, the authors present an idea to realize high-resolution structures with feature sizes less than 100 nm by controlling the laser focus position with respect to the glass substrate. This investigation covers structures fabricated respectively in the plane along and perpendicular to the major axis of voxel. The authors also provide a useful approach to manage the fabrication of proposed periodic structure with a periodic distance of 200 nm and a gap size of 65 nm.