Smart brush based on a high density CMOS stress sensor array and SU-8 microposts
Smart brush based on a high density CMOS stress sensor array and SU-8 microposts
复制标题
基于高密度 CMOS 应力传感器阵列和 SU-8 微柱的智能刷
DOI：
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发表时间：
2007
期刊：
影响因子：
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通讯作者：
O. Paul
中科院分区：
文献类型：
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作者：
P. Gieschke;J. Held;M. Doelle;J. Bartholomeyczik;P. Ruther;O. Paul
本文报道了一种在芯片表面制作的与SU-8柱相结合的CMOS集成应力传感器阵列。该芯片包含1024个基于场效应管(FET)的应力传感器阵列，总面积约为1x1mm2。片上电路用于传感器寻址、信号放大、A/D转换、信号处理和串行总线通信。一种新的可扩展的基于矩阵的传感器选择概念使高密度应力传感器阵列能够以最少的布线进行集成。该系统大大扩展了以前的应力传感器阵列，增加了传感器数量，减少了传感器间距。在芯片上制作了直径为62微米、高度为300微米的8×8圆形SU-8柱阵列。新的刷式装置被用来测量垂直和水平的力分布。
This paper reports on a CMOS integrated stress sensor array combined with SU-8 posts fabricated on the chip surface. The chip contains an array of 1024 field effect transistor (FET)-based stress sensors occupying a total area of ca. 1 x 1 mm2. On-chip circuitry is used for sensor addressing, signal amplification, A/D conversion, signal processing, and serial bus communication. A novel scalable matrix-based sensor selection concept enables the integration of high-density stress sensor arrays with minimum wiring. The system significantly expands previous stress sensor arrays in terms of an increased number of sensors and reduced sensor pitch. An array of 8 x 8 circular SU-8 posts with a diameter of 62 mum and a height of 300 mum was fabricated on the CMOS chips. The new brush-like device was used for measuring vertical and horizontal force distributions.