Designing three-dimensional ordered structures from directed self-assembly of block copolymer films in topographical templates
Designing three-dimensional ordered structures from directed self-assembly of block copolymer films in topographical templates
复制标题
从形貌模板中嵌段共聚物薄膜的定向自组装设计三维有序结构
DOI：
10.1016/j.polymer.2015.07.007
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发表时间：
2015-08-18
期刊：
影响因子：
4.6
通讯作者：
Lin, Jiaping
中科院分区：
文献类型：
--
作者：
Cao, Xuguang;Zhang, Liangshun;Lin, Jiaping
嵌段共聚物的定向自组装为构建深亚100 nm分辨率的三维（3D）器件导向纳米结构提供了一种新的范例。为了清楚地揭示具有长程有序的3D图案，本文利用计算机模拟来探索在形貌模板中形成圆柱形嵌段共聚物膜的定向自组装行为。与体中的3D结构不同，通过调制形貌模板的设计参数来独立地操纵3D有序结构的各个层中的圆柱体取向。此外，提出了一套设计策略，以精确地构建在所需的位置和层的T形结和凹凸的3D非平凡结构。重要的是，模拟澄清了关于3D互连结构形成范围的实验观察，并表明垂直互连强烈依赖于模板厚度。这些结果提供了详细的洞察3D组装结构的性质，并进一步提供了有前途的策略，用于构建3D器件导向的元素，如T型结，凹凸和互连。(C)2015爱思唯尔有限公司版权所有。
Directed self-assembly of block copolymers offers a novel paradigm for building up three-dimensional (3D) device-oriented nanostructures towards deep sub-100-nm resolution. To clearly unveil the 3D patterns with long-range order, we herein utilize computer simulations to explore the directed self-assembly behaviors of cylindrical-forming block copolymer films in topographical templates. Unlike the 3D architectures in the bulk, the cylinder orientations in various layers of 3D ordered structures are independently manipulated by modulating the design parameters of topographical templates. Moreover, a set of design strategies are proposed to precisely construct the 3D non-trivial structures with T-junctions and jogs at desired locations and layers. Importantly, the simulations clarify the experimental observations about the formation range of 3D interconnected structures, and manifest that the vertical interconnections depend strongly on the template thickness. These results provide detailed insights into the nature of 3D assembled structures, and furthermore offer promising strategies for constructing the 3D device-oriented elements such as T-junctions, jogs and interconnections. (C) 2015 Elsevier Ltd. All rights reserved.