Integrated optical inspection on surface geometry and refractive index distribution of a microlens array
Integrated optical inspection on surface geometry and refractive index distribution of a microlens array
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DOI：
10.1016/j.optcom.2003.07.045
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发表时间：
2003-10
影响因子：
2.4
通讯作者：
C. Quan;S. H. Wang;C. Tay;I. Reading;Z. Fang
中科院分区：
文献类型：
--
作者：
C. Quan;S. H. Wang;C. Tay;I. Reading;Z. Fang
本文提出了一种基于光学干涉测量的有效方法来研究平面微透镜阵列的表面几何/轮廓和折射率分布。实验装置由钠光源和He-Ne激光源组成，它们被并入显微系统。具有不同相干长度的两个光源交替地用于表面几何形状和折射率评估。利用所提出的算法、快速傅里叶变换（FFT）以及条纹跟踪，对钠光和激光光源照明产生的条纹图进行了分析。实验结果表明，在相同的设置可以很容易地确定的微透镜的表面轮廓和梯度折射率特性。此外，共同的光路设计使所提出的设置是不敏感的环境振动。
This paper presents an effective technique based on optical interferometry to investigate the surface geometry/profile and refractive index distribution of a planar microlens array. The experimental setup consists of a sodium light source and a He–Ne laser source, which are incorporated into a microscopy system. The two light sources with different coherence lengths are utilized alternatively for surface geometry and refractive index evaluation. The fringe patterns resulting from the sodium light and laser source illumination are analyzed by the proposed algorithms, fast Fourier transform (FFT) as well as fringe tracking. Experimental results demonstrate that surface profile and graded-index property of the micro-lenses can be readily determined in the same setup. In addition the common optical-path design enables the proposed setup to be insensitive to environment vibration.