Fabrication of large-size SiC mirror with precision aspheric profile for artificial satellite
Fabrication of large-size SiC mirror with precision aspheric profile for artificial satellite
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DOI：
10.1016/j.precisioneng.2013.01.009
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发表时间：
2013-07-01
影响因子：
3.6
通讯作者：
Kubota, Hiroaki
中科院分区：
文献类型：
--
作者：
Shimizu, Yuki;Goto, Shigeaki;Kubota, Hiroaki
本文提出了一种用于人造卫星上使用的大型镜子的机上表面轮廓测量系统。该测量系统是通过在商用旋转磨床上安装长行程长度计来构建的，用于制造镜面轮廓。将长度计安装在旋转磨床的滑块上可以评估镜子的轮廓，其结果将用于补偿镜子的轮廓误差。在开发的系统中，长度规的定位误差和倾斜未对准都会引起显着的测量误差。因此，在本研究中，开发了一种定量对准方法和补偿方法，以减少与长度规的定位误差和倾斜未对准相关的测量误差。此外，系统地研究了所开发系统的测量不确定度，以确认其在镜面轮廓测量上的可行性。测量结果最终反馈给镜面轮廓加工，使轮廓误差降至5μm以内。还报告了补偿加工前后在机器上测量的镜面轮廓。 (C) 2013 Elsevier Inc. 保留所有权利。
This paper presents an on-machine surface profile measurement system for a large mirror to be used on artificial satellites. The measurement system is constructed by mounting a long-stroke length gauge on a commercial rotary grinder for fabrications of mirror profiles. Mounting the length gauge on slides of the rotary grinder enables evaluations of the mirror profiles, which results would be used to compensate profile errors of the mirrors. In the developed system, both positioning errors and tilt misalignments of the length gauge would induce significant measurement errors. In this study, a quantitative alignment method and a compensation method are therefore developed to reduce the measurement errors related to both the positioning errors and tilt misalignments of the length gauge. In addition, a measurement uncertainty of the developed system has been systematically investigated to confirm its feasibility on the mirror profile measurements. The measured results were finally fed back to the mirror profile fabrication so that the profile error could be reduced to less than 5 mu m. Mirror profiles measured on machine before and after compensation machining are also reported. (C) 2013 Elsevier Inc. All rights reserved.