Full characterisation of pull-in in single-sided clamped beams
Full characterisation of pull-in in single-sided clamped beams
复制标题
单侧夹紧梁拉入的完整表征
DOI：
10.1016/j.sna.2003.09.023
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发表时间：
2004
影响因子：
4.6
通讯作者：
R. Wolffenbuttel
中科院分区：
文献类型：
--
作者：
L. Rocha;E. Cretu;R. Wolffenbuttel
静电激励梁的电压-挠度曲线最显著的特征是吸合。吸合电压的实际值取决于：驱动模式、温度依赖性和介电充电相关漂移。这些方面已被分析使用设计为9V标称吸合电压的结构，并在市售epipoly工艺制造。为了避免梁中残余应力对拉入的影响，采用了单侧固支梁。典型的结果是：晶圆上的吸合电压变化小于5%，0.17-1.9V迟滞（取决于驱动模式），工作前2周内的-1mV/K TC和-12mV漂移。
The most striking characteristic of the voltage-to-deflection curve of an electrostatically actuated beam is pull-in. The actual value of the pull-in voltage depends on: drive mode, temperature dependence and dielectric charging related drift. These aspects have been analysed using structures designed for a 9V nominal pull-in voltage and fabricated in a commercially available epipoly process. Single-sided clamped beams have been used to avoid any influence of residual stress in the beam on pull-in. Typical results are: less than 5% variation of the pull-in voltage over a wafer, 0.17–1.9V hysteresis depending on drive mode, a −1mV/K TC and −12mV drift during the first 2 weeks of operation.