Effect of the methane flow ratio on the structural and mechanical properties of high-entropy alloy co-doped DLC films
Effect of the methane flow ratio on the structural and mechanical properties of high-entropy alloy co-doped DLC films
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DOI:
10.1016/j.diamond.2021.108486
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发表时间:
2021-06
影响因子:
4.1
通讯作者:
Xiuyan Li;Weimin Tang;Cihai Chen;Chuanlei Xu
中科院分区:
文献类型:
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作者:
Xiuyan Li;Weimin Tang;Cihai Chen;Chuanlei Xu