Production of high-density capacitively coupled radio-frequency discharge plasma by high-secondary-electron-emission oxide
Production of high-density capacitively coupled radio-frequency discharge plasma by high-secondary-electron-emission oxide
复制标题
DOI：
10.1063/1.1827353
复制
发表时间：
2004-11
影响因子：
4
通讯作者：
Y. Ohtsu;H. Fujita
中科院分区：
文献类型：
--
作者：
Y. Ohtsu;H. Fujita
利用具有高二次电子发射系数的MgO电极产生了电子密度ne>1010cm−3的高密度电容耦合射频等离子体。结果发现，在MgO电极的情况下，等离子体密度和光发射强度都比Al电极的情况下高约一个数量级。
High-density capacitively coupled radio-frequency plasma with electron density ne>1010cm−3 was produced using MgO electrodes with a high secondary-electron-emission coefficient. It was found that in the case of MgO electrodes, both plasma density and optical emission intensity were about one order of magnitude higher than those in the case of Al electrodes.