Y. Miyoshi, S. George, L. Okada,S. Miyazaki and M. Hirose: "In Situ Observation of Surface Reactions during Plasma Enhanced CVD using FT-IR-ATR" Proceeding of the 16th Symposium on Dry Process. 151-156 (1994)
Y. Miyoshi, S. George, L. Okada,S. Miyazaki and M. Hirose: "In Situ Observation of Surface Reactions during Plasma Enhanced CVD using FT-IR-ATR" Proceeding of the 16th Symposium on Dry Process. 151-156 (1994)
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Y. Miyoshi、S. George、L. Okada、S.
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