Microelectronic sensors for simultaneous measurement of PO2 and pH.
Microelectronic sensors for simultaneous measurement of PO2 and pH.
复制标题
用于同时测量 PO2 和 pH 值的微电子传感器。
DOI:
10.1007/978-1-4613-1927-6_53
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发表时间:
1987
影响因子:
--
通讯作者:
Makovos,EB
中科院分区:
文献类型:
--
作者:
Liu,CC;Neuman,MR;Romankiw,LT;Makovos,EB
Sensors capable of simultaneous measurement of pH and Po2in an aqueous solution have been fabricated in planar form using microelectronic technology. Separate potentiometric metal-metal oxide pH and three electrode amperemetric Po2sensors have been fabricated together on a silicon chip with active surface of 2 x 3 mm. Rhodium-rhodium oxide electrodes operating in a cyclic voltammetry mode have also been studied and show sensitivity to both pH and Po2in different regions of the voltage swept curve.