Fabrication of High Aspect Ratio Micropatterns in Soluble Block-copolymer Polyimide by UV-assisted Thermal Imprint Process
Fabrication of High Aspect Ratio Micropatterns in Soluble Block-copolymer Polyimide by UV-assisted Thermal Imprint Process
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通过紫外辅助热压印工艺在可溶性嵌段共聚物聚酰亚胺中制造高纵横比微图案
DOI:
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发表时间:
2018
期刊:
影响因子:
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通讯作者:
and Hiroshi Hiroshima
中科院分区:
文献类型:
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作者:
Sung-Won Youn;Kenta Suzuki;and Hiroshi Hiroshima