Accurate microfour-point probe sheet resistance measurements on small samples
Accurate microfour-point probe sheet resistance measurements on small samples
复制标题
DOI：
10.1063/1.3125050
复制
发表时间：
2009-05-01
影响因子：
1.6
通讯作者：
Hansen, Ole
中科院分区：
文献类型：
--
作者：
Thorsteinsson, Sune;Wang, Fei;Hansen, Ole
我们证明，在不施加校正因子的情况下，可以使用微型四点探头对小样本进行精确的方阻测量。利用双构型测量，当微四点探头在尺寸为探头节距的几倍的小样品的镜面附近时，可以高精度地提取方块电阻。我们从理论上计算了“甜蜜点”的大小，在这一点上，方阻得到了足够精确的结果，并表明，即使对于非常小的样本，以足够的精度进行方阻的无校正提取也是可行的。例如，使用10微米间距的微型四点探头并假设探头对准精度为+/-2.5微米，可以以0.3%(0.1%)的精度表征40微米(50微米)正方形样品的方块电阻。
We show that accurate sheet resistance measurements on small samples may be performed using microfour-point probes without applying correction factors. Using dual configuration measurements, the sheet resistance may be extracted with high accuracy when the microfour-point probes are in proximity of a mirror plane on small samples with dimensions of a few times the probe pitch. We calculate theoretically the size of the "sweet spot," where sufficiently accurate sheet resistances result and show that even for very small samples it is feasible to do correction free extraction of the sheet resistance with sufficient accuracy. As an example, the sheet resistance of a 40 mu m (50 mu m) square sample may be characterized with an accuracy of 0.3% (0.1%) using a 10 mu m pitch microfour-point probe and assuming a probe alignment accuracy of +/- 2.5 mu m.