Crystalline silicon cantilevers for piezoresistive detection of biomolecular forces
Crystalline silicon cantilevers for piezoresistive detection of biomolecular forces
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DOI：
10.1016/j.mee.2008.01.082
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发表时间：
2008-05-01
影响因子：
2.3
通讯作者：
Bausells, J.
中科院分区：
文献类型：
--
作者：
Villanueva, G.;Plaza, J. A.;Bausells, J.
为了获得用于生物分子检测的力分辨率优于100pN的传感器，研制了由晶硅制成的U型压阻悬臂梁。这些电阻是通过离子注入As+来定义的，产生了浅而薄的电阻，它们被平行于(100)晶体方向图案化，达到了压阻系数的最大值。对于长度为250微米、宽度为8微米、厚度为340 nm的悬臂梁，其灵敏度共同表征为力分辨率，分别为60µV/pN和65pN。(C)2008爱思唯尔B.V.保留所有权利。
In order to obtain a sensor with force resolution better than 100 pN for biomolecular detection, U-shaped piezoresistive cantilevers made of crystalline silicon have been fabricated. The resistors have been defined by ionic implantation of As+, yielding a shallow and thin resistor and they have been patterned parallel to the (100) crystallographic direction, attaining a maximum for the piezoresistive factor. The sensitivity of the devices is characterized together as the force resolution, being both of them 60 mu V/pN and 65 pN, respectively, for a cantilever with a length of 250 mu m, a width of 8 mu m and a thickness of 340 nm. (C) 2008 Elsevier B.V. All rights reserved.