Study of the contact resistance of α-Ga2O3 on m-plane sapphire substrate with respect to Sn concentration using the circular transfer length method
Study of the contact resistance of α-Ga2O3 on m-plane sapphire substrate with respect to Sn concentration using the circular transfer length method
复制标题
利用圆转移长度法研究α-Ga2O3在m面蓝宝石衬底上的接触电阻随Sn浓度的变化
DOI:
10.35848/1347-4065/acc03b
复制
发表时间:
2023
期刊:
影响因子:
--
通讯作者:
T. Araki
中科院分区:
文献类型:
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作者:
Y. Yamafuji;J. Kikawa;S. Yamashita;T. Shinohe;T. Araki