Real‐time characterization of acoustic modes of polyimide thin‐film coatings using impulsive stimulated thermal scattering
Real‐time characterization of acoustic modes of polyimide thin‐film coatings using impulsive stimulated thermal scattering
复制标题
使用脉冲受激热散射实时表征聚酰亚胺薄膜涂层的声模式
DOI：
10.1063/1.106539
复制
发表时间：
1992
期刊：
影响因子：
--
通讯作者：
M. Rothschild
中科院分区：
文献类型：
--
作者：
A. Duggal;J. Rogers;K. Nelson;M. Rothschild
提出了一种实时光学表征薄膜声学模式的方法。对附着在硅衬底上的(∼1μm)聚酰亚胺薄膜的伪瑞利声波进行了光学激发和实时监测。所得结果可用于确定力学性能(弹性模数)，并指导薄膜的制备和固化过程。
A method for real‐time optical characterization of thin‐film acoustic modes is demonstrated. Pseudo‐Rayleigh acoustic waves of thin (∼1 μm) polyimide films attached to silicon substrates are optically excited and monitored in real time as they propagate. The results can be used to determine mechanical properties (elastic moduli) and to guide thin‐film fabrication and curing procedures.