In situ grazing incidence small-angle x-ray scattering real-time monitoring of the role of humidity during the structural formation of templated silica thin films

In situ grazing incidence small-angle x-ray scattering real-time monitoring of the role of humidity during the structural formation of templated silica thin films
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原位掠入射小角X射线散射实时监测模板化二氧化硅薄膜结构形成过程中湿度的作用

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发表时间:
2004
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通讯作者:
B. Ocko
B. Ocko
中科院分区:
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文献类型:
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作者:
A. Gibaud;S. Dourdain;O. Gang;B. Ocko

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利用实时掠入射小角X射线散射研究了相对湿度在模板二氧化硅薄膜形成过程中的作用。详细分析了晶格参数随相对湿度的变化规律。结果表明,在可调制稳态下,在达到暂态区后,平行于表面的晶格参数被钉扎,而垂直于表面的参数仍然可以变化。在初始阶段,我们发现每个胶束可以吸收多达一层水。干涉测量证实,整个薄膜都发生了膨胀。给出了钉扎效应的解释。
The role of RH (relative humidity) during the formation of templated silica thin films has been investigated using real-time grazing incidence small-angle x-ray scattering. A detailed analysis of the evolution of the lattice parameters as a function of RH is presented. It is shown that in the modulable steady state, the lattice parameter parallel to the surface is pinned after a transient regime is reached while the parameter normal to the surface can still vary. In the initial stage we find that the film can take up to one layer of water per micelle. Interferometric measurements confirm that swelling occurs in the entire film. An explanation of the pinning effect is presented.