Inorganic-organic hybrid materials for application in optical devices
Inorganic-organic hybrid materials for application in optical devices
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DOI：
10.1016/s0040-6090(03)00982-9
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发表时间：
2003-10-01
期刊：
影响因子：
2.1
通讯作者：
Bräuer, A
中科院分区：
文献类型：
--
作者：
Houbertz, R;Domann, G;Bräuer, A
集成的无源和有源光学器件是当前和未来数据传输技术中的关键部件。为了满足未来对衍射、折射和集成光学器件小型化的要求，需要具有更高热稳定性和与传统半导体器件生产工艺更好兼容性的新材料。以相当低的成本和高度的重复性生产的无机-有机杂化聚合物(ORMOCER((R))S)现在被证明是候选产品。材料可以被功能化，使得它们的物理和化学性质可以针对例如晶片规模的光学应用而定制，例如光波导、光栅或微光学器件。这种材料表现为负性抗蚀剂，因此可以通过紫外线曝光以良好的分辨率进行图案化。此外，该材料非常适合于薄膜和厚膜封装技术。我们在这里特别关注用于光学(电信/微光学)应用的材料。从化学功能的角度对其光学行为进行了表征和讨论。此外，还给出了用紫外光刻法或复制技术生产的部分光学元件的应用实例。(C)2003 Elsevier Science B.V.保留所有权利。
Integrated passive and active optical devices are the key components in current and future data transfer technologies. In order to fulfill future requirements in miniaturization for diffractive, refractive and integrated optical devices, new materials with higher thermal stability and a better compatibility to processing techniques used in conventional semiconductor devices production are needed. Inorganic-organic hybrid polymers (ORMOCER((R))s) produced at fairly low costs with a high degree of reproducibility are now proven candidates. The materials can be functionalized such that their physical and chemical properties can be tailored towards, e.g. optical applications on wafer-scale such as waveguides, gratings or microoptical devices. The materials behave as a negative resist and can thus be patterned by UV exposure with good resolution. Besides, the materials are very well suited for thin and thick film packaging technology. We here particularly focus on materials for optical (telecom/microoptics) applications. The optical behavior is characterized and discussed with respect to the chemical functionalities. Additionally, some application examples of selected optical components are given, produced either by UV lithography or by replication technology. (C) 2003 Elsevier Science B.V. All rights reserved.