Growth rate and EBSD texture analysis of nitrogen doped diamond films
Growth rate and EBSD texture analysis of nitrogen doped diamond films
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氮掺杂金刚石薄膜的生长速率和 EBSD 织构分析
DOI：
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发表时间：
2008
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影响因子：
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通讯作者：
D. Raabe
中科院分区：
文献类型：
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作者：
T. Liu;D. Raabe
采用直流化学气相沉积（CVD）方法，通过改变气源中氮气的添加量制备了金刚石薄膜。利用高分辨电子背散射衍射（HR-EBSD）和X射线衍射（XRD）研究了氮的加入对异质外延多晶金刚石薄膜织构和晶粒形状演变的影响。分析表明，添加1.5%的N2到CH 4气流导致{110}纤维织构的强烈增强。这种现象进行了讨论的竞争性增长的选择机制。
Chemical-Vapor-Deposition (CVD) diamond films were prepared using a variation of nitrogen addition into the gas source admixture by a direct current CVD method. The influence of nitrogen addition on the crystallographic texture and grain shape evolution in heteroepitaxial polycrystalline diamond films was investigated using high-resolution electron backscattering diffraction (HR-EBSD) and X-ray diffraction (XRD). The analysis reveals that an addition of 1.5% N2 to the CH4 gas flow leads to a strong enhancement of a {110} fiber texture. The phenomenon is discussed in terms of a competitive growth selection mechanism.