Novel 3D SEM Moiré method for micro height measurement.
Novel 3D SEM Moiré method for micro height measurement.
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DOI：
10.1364/oe.21.015734
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发表时间：
2013-07
期刊：
影响因子：
3.8
通讯作者：
Chuanwei Li;Zhanwei Liu;H. Xie;Dan Wu
中科院分区：
文献类型：
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作者：
Chuanwei Li;Zhanwei Liu;H. Xie;Dan Wu
首次提出了一种具有纳米级灵敏度的3D SEM莫尔法（SMM）。结合扫描电镜的立体视觉技术和现有的面内扫描显微镜的原理，从理论上建立了三维扫描显微镜的几何模型。对不同条件下产生的虚拟投影条纹进行了三维重建分析。两个典型的应用程序已被用于实验验证的理论模型。实验结果与理论模型吻合较好，高度测量灵敏度小于10nm。通过其它辅助测量方法对该方法进行了不确定度分析。
A 3D SEM Moiré Method (SMM) is proposed in this investigation for the first time for 3D shape measurement with nano-scale sensitivity. The geometric model of the 3D SMM has been theoretically established, combining the stereovision technology in an SEM with the existing principles of in-plane SMM. The Virtual Projection Fringe (VPF) generated under different conditions has been analyzed for 3D reconstructions. Two typical applications have been used to experimentally validate the theoretical model. Experimental results, with the height measurement sensitivity less than 10nm, agree well with the theoretical model we proposed. The uncertainty analysis for the method has also been performed by other auxiliary measurements.