Optical measurement methods for refractive microlenses and arrays
Optical measurement methods for refractive microlenses and arrays
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DOI：
10.1117/12.450450
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发表时间：
2001-12
期刊：
影响因子：
--
通讯作者：
N. Lindlein;J. Schwider
中科院分区：
文献类型：
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作者：
N. Lindlein;J. Schwider
有几个特性的微透镜，必须加以表征：近轴参数，如焦距和更复杂的性质，如表面质量或波像差。对于微透镜阵列，透镜的均匀性和定位的准确性也可能是非常重要的。此外，根据应用，微透镜的表面可以具有球面、非球面或圆柱形形状。将介绍几乎所有这些参数的几种测量方法。泰曼-格林干涉仪用于测量微透镜与理想球面形状的表面偏差，并用于测量表面的曲率半径。马赫-曾德尔干涉仪测量微透镜的波像差和焦距。在掠入射干涉法的帮助下，可以测量所有具有圆柱对称性的表面。表面的横截面可以是圆形或非圆形的。衍射光学元件被用作光束整形器和参考元件。完整的微透镜阵列的测试可以用几种方法完成。Smartt测试可用于测量微透镜阵列的波像差，并且剪切装置可能适合于测量微透镜的焦距的均匀性。
There are several properties of microlenses which have to be characterized: paraxial parameters like the focal length and more complex properties like the surface quality or the wave aberrations. For arrays of microlenses the homogeneity of the lenses and the accuracy of the positioning may also be very important. Additionally, the surface of the microlenses can have spherical, aspherical or cylindrical shape depending on the application. Several measurement methods for nearly all of these parameters will be presented. A Twyman-Green interferometer is used for the measurement of the surface deviations of a microlens from an ideal spherical shape and for the measurement of the radius of curvature of the surface. A Mach-Zehnder interferometer measures the wave aberrations of microlenses and the focal length. With the help of grazing incidence interferometry all surfaces with cylindrical symmetry can be measured. The cross-section of the surfaces can be circular or non-circular. Diffractive optical elements are applied as beam shaper and reference elements. The testing of complete arrays of microlenses can be done with several methods. A Smartt test can be employed to measure the wave aberrations of an array of microlenses and a shearing device might be suitable to measure the uniformity of the focal lengths of the microlenses.