Searching for novel Ru-based thin film metallic glass by combinatorial arc plasma deposition
Searching for novel Ru-based thin film metallic glass by combinatorial arc plasma deposition
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DOI：
10.1143/jjap.46.1590
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发表时间：
2007-04-01
期刊：
影响因子：
--
通讯作者：
Shimokohbe, Akira
中科院分区：
文献类型：
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作者：
Sakurai, Junpei;Hata, Seiichi;Shimokohbe, Akira
采用组合电弧等离子体沉积（CAPD）技术制备了一种新型的Ru-Zr-Al金属玻璃薄膜。为了寻找Ru基薄膜金属玻璃，首先，沉积了1，089个CAPD样品的库，其中通过X射线衍射法选择了15个非晶样品。用能量色散X射线荧光光谱法测定了这些样品的组成。在15个样品中，两个样品具有低Al含量（Ru 65 Zr 30 Al 5和Ru 67 Zr 25 Al 8，at. %），并且在通过溅射沉积的样品中再现它们的组成，因为CAPD样品太小而不能通过差示扫描量热法（DSC）评估玻璃化转变温度T-g和结晶温度T-x。DSC显示，两个烧结沉积样品Ru 65 Zr 30 Al 5和Ru 67 Zr 25 Al 8具有过冷液相区（SCLR），在Ru 65 Zr 30 Al 5的情况下，T-g、T-x和SCLR Δ T-x（= T-x-T-g）的宽度分别为902、973和71 K，在Ru 67 Zr 25 Al 8的情况下，分别为913、979和66 K。此外，烧结沉积的样品Ru 65 Zr 30 Al 5和Ru 67 Zr 25 Al 8表现出上级的机械性能。断裂应力σ（f）、弹性极限σ（1）和杨氏模量E对于Ru 65 Zr 30 Al 5分别为1.9GPa、2.0%和92.7GPa，对于Ru 67 Zr 25 Al 8分别为1.9GPa、2.0%和91.6GPa。
We found out a novel Ru-Zr-Al thin film metallic glass by combinatorial arc plasma deposition (CAPD). To search for Ru-based thin film metallic glasses, first, a library of 1,089 CAPD samples was deposited, of which fifteen amorphous samples were selected by X-ray diffractometry. The compositions of these samples were measured by energy dispersive X-ray fluorescence spectrometry. Front the fifteen samples, two samples having low Al content (Ru65Zr30Al5 and Ru67Zr25Al8, at. %) were chosen, and their compositions were reproduced in samples deposited by sputtering, because the CAPD samples were too small for evaluating the glass transition temperature T-g and crystallization temperature T-x by differential scanning calorimetry (DSC). DSC revealed that the two sputter-deposite samples Ru65Zr30Al5 and Ru67Zr25Al8 had a supercooled liquid region (SCLR), showing a T-g, T-x, and width of SCLR Delta T-x (= T-x-T-g) of 902, 973, and 71 K in the case of Ru65Zr30Al5, and 913, 979, and 66 K in the case of Ru67Zr25Al8, respectively. Moreover, the sputter-deposited samples Ru65Zr30Al5 and Ru67Zr25Al8 exhibited superior mechanical properties. The fracture stress sigma(f), elastic limit epsilon(1), and Young's modulus E were 1.9 GPa, 2.0% and 92.7 GPa, respectively, for Ru65Zr30Al5 and 1.9 GPa, 2.0%, and 91.6 GPa, respectively, for Ru67Zr25Al8.