Real-time vibration amplitude and phase imaging with heterodyne interferometry and correlation image sensor
Real-time vibration amplitude and phase imaging with heterodyne interferometry and correlation image sensor
复制标题
利用外差干涉仪和相关图像传感器进行实时振动幅度和相位成像
DOI：
10.1117/12.794168
复制
发表时间：
2008
期刊：
影响因子：
--
通讯作者：
S. Ando
中科院分区：
文献类型：
--
作者：
Seichi Sato;T. Kurihara;S. Ando
我们提出了一种新的面外振动成像技术，用于微结构固态器件，如MEMS（微电子机械系统）麦克风和谐振器。该技术是基于纵向扫描光学干涉测量和一个集成的图像传感器装置，我们称之为相关图像传感器（CIS）。CIS能够从时变入射光中提取任意频率分量，并产生除常规强度图像外，还包括幅度和相位的复杂相关图像。在振动物体的外差干涉测量中，振动信息被编码成纵向扫描和振动相互调制产生的几个频率分量。本文将新开发的多通道CIS与扫描外差技术相结合，使我们能够同时获得多个频率分量，实时重建振动幅值和相位分布。作为一个例子，MEMS声传感器的振动模式可以在视频速率下重建。本文还讨论了结合其他光外差技术实现高GHz振动成像的理论可能性。
We propose a new out-of-plane vibration imaging technique for micro-structured solid-state devices such as MEMS (microelectro mechanical systems) microphones and resonators. This technique is based on the longitudinally scanning optical interferometry and an integrated image sensor device which we call the correlation image sensor (CIS). The CIS is able to extract an arbitrary frequency component from time-varying incident light and produce a complex correlation image including amplitude and phase in addition to a conventional intensity image. In heterodyne interferometry of vibrating objects, the vibration information is encoded in several frequency components generated by mutual modulation of longitudinal scan and vibration. In this paper, the combination of newly developed multi-channel CIS and the scanning heterodyne technique enable us to obtain the multiple frequency components simultaneously and reconstruct the vibration amplitude and phase distributions in real time. As an example, vibration modes of a MEMS acoustic sensor are shown to be rconstructed at video rate. A theoretical possiblitiy for the imaging of higher than GHz vibration combining other optical heterodyne techniques is also discussed.