Ptychographic atomic electron tomography: Towards three-dimensional imaging of individual light atoms in materials
Ptychographic atomic electron tomography: Towards three-dimensional imaging of individual light atoms in materials
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DOI：
10.1103/physrevb.102.174101
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发表时间：
2020-11-02
影响因子：
3.7
通讯作者：
Miao, Jianwei
中科院分区：
文献类型：
--
作者：
Chang, Dillan J.;Kim, Dennis S.;Miao, Jianwei
通过数值模拟，我们证明了重叠关联成像和原子电子断层扫描相结合的低剂量成像的单个低Z原子在三维空间中的有效方法。通过5 nm氧化锌纳米颗粒的像差校正扫描透射电子显微镜的多切片模拟产生嘈杂的衍射图案后，我们已经实现了单个锌和氧原子及其缺陷的三维（3D）成像，通过对重叠关联投影进行断层扫描。该方法也已在二维材料中进行了模拟，在具有低总电子剂量的垂直WS（2）/WSe 2货车derWaals异质结构中分辨单个硫原子，其中环形暗场图像无法分辨。我们设想，这种方法的发展可能有助于研究辐射敏感系统的精确三维原子结构和低Z原子结构，如二维异质结构，催化剂，功能氧化物和玻璃。
Through numerical simulations, we demonstrate the combination of ptychography and atomic electron tomography as an effective method for low dose imaging of individual low-Z atoms in three dimensions. After generating noisy diffraction patterns with multislice simulations of an aberration-corrected scanning transmission electron microscope through a 5-nm zinc-oxide nanoparticle, we have achieved three-dimensional (3D) imaging of individual zinc and oxygen atoms and their defects by performing tomography on ptychographic projections. The methodology has also been simulated in 2D materials, resolving individual sulfur atoms in verticalWS(2)/WSe2 van derWaals heterostructure with a low total electron dose where annular-dark-field images fail to resolve. We envision that the development of this method could be instrumental in studying the precise 3D atomic structures of radiation sensitive systems and low-Z atomic structures such as 2D heterostructures, catalysts, functional oxides, and glasses.