Plasma techniques for nanostructured carbon materials synthesis. A case study: carbon nanowall growth by low pressure expanding RF plasma
Plasma techniques for nanostructured carbon materials synthesis. A case study: carbon nanowall growth by low pressure expanding RF plasma
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DOI：
10.1088/0963-0252/19/3/034016
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发表时间：
2010-06-01
影响因子：
3.8
通讯作者：
Dinescu, G.
中科院分区：
文献类型：
--
作者：
Vizireanu, S.;Stoica, S. D.;Dinescu, G.
对碳纳米结构合成方法进行了简短描述，并介绍了在生长过程中使用等离子体的优点。作为基于等离子体的技术的一个特定示例，我们详细介绍了通过射频扩展等离子体束合成下游碳纳米墙（CNW）的过程。该技术将用于催化剂沉积的磁控溅射和用于碳生长的等离子体增强化学气相沉积（主要气体：氩气，活性气体：氢气，前体气体：乙炔）结合在单个反应器中。分析重点关注材料特性与沿流轴不同点测量的等离子体特性之间的相关性，旨在揭示等离子体物种在生长过程中的重要性。通过扫描和透射电子显微镜研究材料特性，而等离子体数据通过光学发射光谱、朗缪尔探针和质谱获得。在距前驱体注入点最佳距离处获得了大面积且彼此隔离良好的 CNW，其中等离子体呈现出增加的碳纳米团簇含量。讨论了导致生长的可能过程。
A short description of approaches for carbon nanostructures synthesis is made and the advantages of using plasma during the growth are presented. As a particular example of a plasma based technique we detail the process of downstream carbon nanowall (CNW) synthesis by a radiofrequency expanding plasma beam. The technique combines magnetron sputtering for catalyst deposition and plasma enhanced chemical vapor deposition (main gas: argon, active gas: hydrogen, precursor gas: acetylene) for carbon growth in a single reactor. The analysis focuses on the correlation between the material properties and the plasma characteristics measured at different points along the flow axis, aiming to reveal the importance of plasma species in the growth process. The material properties were investigated by scanning and transmission electron microscopy, whereas the plasma data were obtained by optical emission spectroscopy, Langmuir probes and mass spectrometry. CNWs with a large area and well isolated from each other are obtained at an optimum distance from the precursor injection point where the plasma presents an enhanced content of carbon nanoclusters. The possible processes responsible for the growth are discussed.