A method for interpreting the data from depth-sensing indentation instruments
A method for interpreting the data from depth-sensing indentation instruments
复制标题
DOI：
10.1557/jmr.1986.0601
复制
发表时间：
1986-08-01
影响因子：
2.7
通讯作者：
Nix, W. D.
中科院分区：
文献类型：
--
作者：
Doerner, M. F.;Nix, W. D.
深度感测压痕仪器为研究薄膜的弹性和塑性特性提供了一种手段。描述了一种从这类仪器获得的数据中获得硬度和杨氏模量的方法。弹性位移由压痕卸载过程中获得的数据确定。杨氏模量可以从这些测量中计算出来。此外，为了计算硬度，可以去掉对总位移的弹性贡献。在压痕深度小于一微米的情况下，确定压痕尖端的确切形状对于测量硬度和弹性模量至关重要。硬度取决于应变率，特别是当硬度值是根据沿着加载曲线的数据计算时。
Depth-sensing indentation instruments provide a means for studying the elastic and plastic properties of thin films. A method for obtaining hardness and Young's modulus from the data obtained from these types of instruments is described. Elastic displacements are determined from the data obtained during unloading of the indentation. Young's modulus can be calculated from these measurements. In addition, the elastic contribution to the total displacement can be removed in order to calculate hardness. Determination of the exact shape of the indenter at the tip is critical to the measurement of both hardness and elastic modulus for indentation depths less than a micron. Hardness is shown to depend on strain rate, especially when the hardness values are calculated from the data along the loading curves.