X-ray diffraction from epitaxial multilayered surface gratings

X-ray diffraction from epitaxial multilayered surface gratings
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外延多层表面光栅的 X 射线衍射

DOI:
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发表时间:
1995
期刊:
影响因子:
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通讯作者:
M. Gailhanou
M. Gailhanou
中科院分区:
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文献类型:
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作者:
G. Baumbach;M. Gailhanou

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本文用二阶畸变波玻恩近似理论描述了简单单晶和外延多层表面光栅的X射线衍射。用这种方法模拟了简单光栅和多层光栅的光强分布,并与运动学近似作了比较。光栅同时作为反射和透射光栅。这也在光栅和包括衬底的动态衍射平面结构之间产生Umweganregung。
X-ray diffraction from simple monocrystalline and epitaxial multilayered surface gratings will be described theoretically by use of a distorted wave Born approximation of second order. The intensity patterns of simple and multilayered gratings have been simulated by this treatment and compared with the kinematical approximation. The gratings act simultaneously as reflection and transmission gratings. This gives rise to Umweganregung also between the grating and the dynamical diffracting planar structure including the substrate.