Closed Fluid Cell with Liquid-Sealing Mechanism for Stable and Flexible Operation of Liquid-Environment Atomic Force Microscopy
Closed Fluid Cell with Liquid-Sealing Mechanism for Stable and Flexible Operation of Liquid-Environment Atomic Force Microscopy
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DOI：
10.7567/jjap.52.110109
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发表时间：
2013-11-01
影响因子：
1.5
通讯作者：
Fukuma, Takeshi
中科院分区：
文献类型：
--
作者：
Asakawa, Hitoshi;Katagiri, Yukitoshi;Fukuma, Takeshi
我们开发了一种用于液-环境原子力显微镜（AFM）的封闭液池。在开发的电池中，液体材料用于密封，这可以防止成像溶液的蒸发，因此在测量中提供了高稳定性。此外，密封液体抑制了扫描仪引起的振动的传播，即使在封闭的流体电池中也可以进行原子尺度的成像。在这里，我们提出了原子分辨率成像的云母在液体中使用已开发的细胞。由于密封液体的柔性结构，该机构可以集成到广泛的现有AFM系统中，并在XY尖端定位和样品尺寸方面提供了很高的灵活性。在这里，我们展示了在一个大样品中不同位置的Cu布线模式的纳米级成像，其中尖端位置移动超过1.5mm而不破坏封闭的AFM单元。(C) 2013日本应用物理学会
We have developed a closed fluid cell using the liquid-sealing mechanism for liquid-environment atomic force microscopy (AFM). In the developed cell, a liquid material is used for sealing, which prevents the evaporation of the imaging solution and hence provides a high stability in the measurements. In addition, the sealing liquid suppresses the transmission of the vibrations induced by the scanner, which enables atomic-scale imaging even with a closed fluid cell. Here, we present the atomic-resolution imaging of mica in liquid using the developed cell. Owing to the flexible structure of the sealing liquid, the mechanism can be integrated into a wide range of existing AFM systems and provides a high flexibility in the XY tip positioning and the sample size. Here, we demonstrate the nanoscale imaging of Cu wiring patterns at different locations in a large sample, where the tip position is moved by more than 1.5mm without breaking the closed AFM cell. (C) 2013 The Japan Society of Applied Physics