Simplified method for analyzing nanoindentation data and evaluating performance of nanoindentation instruments
Simplified method for analyzing nanoindentation data and evaluating performance of nanoindentation instruments
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DOI：
10.1557/jmr.2001.0426
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发表时间：
2001-11
影响因子：
2.7
通讯作者：
Takeshi Sawa;Kohichi Tanaka
中科院分区：
文献类型：
--
作者：
Takeshi Sawa;Kohichi Tanaka
纳米压痕是评价薄膜力学性能的一种简单有效的方法。在这种情况下，一些公司开发了纳米压痕测试仪并将其商业化。在本研究中，我们使用6种不同类型的测试仪测试了标准的4个样品，并建立了一种评估纳米压痕数据的方法。该方法只需要两个校正因子；一个是试验机的框架柔度C _f，另一个是对原始表面的检测误差，其中包括压头顶点的截断和压头预压引起的表面损伤。后一种校正是通过在测得的侵彻深度h上加上校正长度Δ h _C来进行的。结果表明，Δ h _C值随材料硬度的降低而增大，对测试仪器的性能非常敏感。
Nanoindentation is a simple and effective means for evaluating the mechanical properties of thin films. In such circumstances, nanoindentation testers have been developed and commercialized by some companies. In this study, we tested the standard four specimens using six different types of testers and established a method to evaluate the nanoindentation data. The method requires only two correction factors; one is the frame compliance, C _f, of the testers, and the other is the error of the detection of the original surface which includes both the truncation of the indenter apex and the damage of the surface caused by the preloading of the indenter. The latter correction is conducted by adding a correction length, Δ h _C, to the measured penetration depth, h . It was found that the values Δ h _C increase with decrease in the hardness of material and are very sensitive to the performance of the testers.